感興趣的主題包括但不限于:尺寸從微米到毫米不等的設備、ic兼容制造技術、其他制造技術、微現(xiàn)象測量、理論結果、新材料和設計、微執(zhí)行器、微機器人、微電池、軸承、磨損、可靠性、電氣互連、微操作操作以及適用于MEMS的標準。流體學、光學、生物醫(yī)學工程等領域的應用實例和面向應用的器件也是人們關注的焦點。

The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.